제일인터내셔널

300mm KWF Series

Many performances for micronization, N2 Purge, 200mm CST

Features

Accommodating device miniaturization	Unique airflow analysis to prevent particles. N2 purge on load port.
Accommodating various carriers	Accommodating FOUP, MAC and AUTO-FOSB.
High reliability	High reliability achieved by accumulated technology of 300mm load port. (MCBF:1,000,000cycle) Detect double or crossed wafers by high precision mapping. Latch over-rotation to close carriers completely.
Easy Maintenance	No batteries are used, and maintenance is much easier

FOPLP HPLP Series

Pass on accumulated technology at 300mm / 450mm

Features

Response to micronization	Securing cleanliness by independent airflow analysis N2 Purge Option, N2 Shield Option etc
Responsive to a variety of containers	FOUP, 200mm CST, Auto-Fosb, Open CST, etc Responsive to a variety of containers
High reliability	Equipped with accumulated technology for high reliability High precision mapping capability detects various Wafer states Securely close the container with Latch Key over-rotation
Improve Maintenance	Significantly improve Maintenance performance by not using Battery

200mm SMIF Pod Opener KWP Series (auto open/close)

Auto-opening and closing type by parent device

Features

Automatic opening and closing by host device type	Achieves a mini environment by docking with the host device
High level of cleanliness performance	Reduces particles by separating the machinery section and with forced exhaust
Prevents the inclusion of particles by controlling air flow	Prevents turbulence and the inclusion of particles by controlling the opening and closing operation of the pod
Small footprint	Easily connected to and incorporated with dedicated equipment by the achievement of the small footprint
Supports reticule pods	Capable of opening and closing RSP-200 standard pods (optional)