Lightweight ∙ Space saving ∙ High-speed transfer ∙ Compatible with multi-stage devices

Features
| a rich variation | Single arm, single arm with flip-axis, twin arm, twin arm with single-arm flip-axis, others |
|---|---|
| Supports a long stroke elevating axis | Additional 940 mm long stroke variation with the telescopic elevating axis |
| Battery free | Eliminates the encoder backup battery by employing a new encoder |
| Throughput improvements | Achieves smooth, continuous movements by improvements in the movement control function uniquely developed by Hirata |
| Vibration suppression control | Achieves the suppression of mechanical vibrations by employing vibration suppression control uniquely developed by Hirata |


