Products Info
EFEM / Sorter
Features
| Supports process node scaling and advanced integration | Super Clean technology supports process node expansion, and the N2 purge function allows for quick replacement of air. |
|---|---|
| Abundant variations, customizable | We can respond to your requirements thanks to an expandable base design |
| Reliability built on our record | Inherits our robot technologies backed by our delivery record of over 40,000 units 5 years maintenance free |
| Throughput | Achieves a high throughput of 500 wafers an hour with our proprietary motion technologies |
| Reduces the environmental burden | Battery free servo motors |
Features
| Supports process node scaling and advanced integration | Super Clean technology supports process node expansion, and the N2 purge function allows for quick replacement of air. |
|---|---|
| Abundant variations, customizable | We can respond to your requirements thanks to an expandable base design |
| Reliability built on our record | Inherits our robot technologies backed by our delivery record of over 40,000 units 5 years maintenance free |
| Throughput | Achieves a high throughput of 500 wafers an hour with our proprietary motion technologies |
| Reduces the environmental burden | Battery free servo motors |